Title:
ELECTRON SOURCE MANUFACTURING METHOD
Document Type and Number:
WIPO Patent Application WO/2006/075715
Kind Code:
A1
Abstract:
An electron source having excellent uniformity in current irradiation distribution is surely provided at a low cost. A method for manufacturing the electron source having an electron emitting section at one end of a rod is characterized in that it includes a step of forming the electron emitting section by machining, and a step of removing a damaged layer (19) on the surface of the formed electron emitting section by chemical polishing or electrolytic polishing.
Inventors:
SAKAWA SEIICHI (JP)
TERUI YOSHINORI (JP)
TERUI YOSHINORI (JP)
Application Number:
PCT/JP2006/300394
Publication Date:
July 20, 2006
Filing Date:
January 13, 2006
Export Citation:
Assignee:
DENKI KAGAKU KOGYO KK (JP)
SAKAWA SEIICHI (JP)
TERUI YOSHINORI (JP)
SAKAWA SEIICHI (JP)
TERUI YOSHINORI (JP)
International Classes:
H01J1/304; H01J1/30; H01J9/20; H01J37/073
Domestic Patent References:
| WO2004073010A1 | 2004-08-26 |
Foreign References:
| JPS5451472A | 1979-04-23 | |||
| JP2003324050A | 2003-11-14 | |||
| JPH01299731A | 1989-12-04 |
Other References:
See also references of EP 1858047A4
Attorney, Agent or Firm:
Senmyo, Kenji (38 Kanda-Higashimatsushitach, Chiyoda-ku Tokyo, JP)
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