ELECTRON SOURCE, METHOD FOR PRODUCING ELECTRON SOURCE, AND ELECTRON EMISSION METHOD

WIPO Patent Application WO/2011/033989

A1

Disclosed is an electron source in which an emitter (11) is provided with a needle-like single crystal tungsten rod (11a) having a front end portion (16) that has the {100} crystal plane as an electron emission surface (16a) at the front end. The electron emission surface (16a) is coated with a ZrO film for reducing the work function. Auxiliary rods (11b, 11c) are attached to the needle-like single crystal tungsten rod (11a). The needle-like single crystal tungsten rod (11a) and the auxiliary rods (11b, 11c) are provided with diffusion sources (12) for diffusing/supplying Zr and O. The auxiliary rods (11b, 11c) are provided with paths for diffusing/supplying Zr and O to the electron emission surface (16a) other than the outer surface of the needle-like single crystal tungsten rod (11a).

JP3632682	ELECTRON EMISSION BODY AND MANUFACTURING METHOD THEREFOR, COLD CATHODE FIELD ELECTRON EMISSION ELEMENT AND MANUFACTURING METHOD THEREFOR, AND COLD CATHODE FIELD ELECTRON EMISSION DISPLAY DEVICE AND MANUFACTURING METHOD THEREFOR
JP5024885	Cathode

YAMANISHI YOSHIKI (JP)
OOASA TAKAHIKO (JP)
NAKAO KEN (JP)
KANDA MAKOTO (JP)
MORISHITA TOSHIYUKI (JP)

PCT/JP2010/065545

March 24, 2011

September 09, 2010

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TOKYO ELECTRON LTD (JP)
DENKI KAGAKU KOGYO KK (JP)
YAMANISHI YOSHIKI (JP)
OOASA TAKAHIKO (JP)
NAKAO KEN (JP)
KANDA MAKOTO (JP)
MORISHITA TOSHIYUKI (JP)

H01J1/304; H01J9/02; H01J37/073

JP2004265614A	2004-09-24
JPH10144245A	1998-05-29

KIMURA MITSURU (JP)
Mitsuru Kimura (JP)

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