ELECTRON SOURCE - DENKI KAGAKU KOGYO KABUSHIKI KAISHA

Title:

ELECTRON SOURCE

Document Type and Number:

WIPO Patent Application WO/2011/142054

Kind Code:

A1

Abstract:

Provided are an electron source which allows a high-angle current density operation even at a low extraction voltage, and reduces excess current that causes vacuum deterioration; and an electronic device using the electron source. The electron source has a cathode composed of single-crystal tungsten, and a diffusion source provided in the intermediate portion of the cathode. In the cathode, the angle between the axial direction of the cathode and <100> orientation of the cathode is adjusted so that electrons to be emitted from the vicinity of the boundary between (100) surface and (110) surface formed on the tip of the cathode, are emitted substantially parallel to the axis of the cathode. The electronic device is provided with the electron source. The electron source has a cathode composed of single-crystal tungsten, wherein the angle between the axial direction of the cathode and <100> orientation of the cathode is adjusted so that electrons to be emitted from the vicinity of the boundary between (100) surface and (110) surface formed on the tip of the cathode, are emitted substantially parallel to the axis of the cathode; and a diffusion source provided in the intermediate portion of the cathode.

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Inventors:

NONOGAKI Ryozo (1135 Nakamur, Shibukawa-city Gunma 20, 〒3778520, JP)
野々垣　良三 (〒20 群馬県渋川市中村１１３５番地　電気化学工業株式会社　渋川工場内 Gunma, 〒3778520, JP)

Application Number:

JP2010/071340

Publication Date:

November 17, 2011

Filing Date:

November 30, 2010

Export Citation:

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Assignee:

DENKI KAGAKU KOGYO KABUSHIKI KAISHA (1-1 Nihonbashi-Muromachi 2-chome, Chuo-ku Tokyo, 38, 〒1038338, JP)
電気化学工業株式会社 (〒38 東京都中央区日本橋室町二丁目１番１号 Tokyo, 〒1038338, JP)
NONOGAKI Ryozo (1135 Nakamur, Shibukawa-city Gunma 20, 〒3778520, JP)

International Classes:

H01J1/304; H01J1/15; H01J37/06

Attorney, Agent or Firm:

WATANABE Kaoru (KUNPU INTELLECTUAL PROPERTY AGENTS, SUCCESS-SENGAKUJI BLDG. 3F 2-20-29, Takanawa, Minato-k, Tokyo 74, 〒1080074, JP)

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Claims:

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