Title:
ELECTRON STACKING IMAGING METHOD AND APPARATUS FOR AUTOMATICALLY CORRECTING DEVIATION OF ZONE AXIS OF SAMPLE
Document Type and Number:
WIPO Patent Application WO/2023/011569
Kind Code:
A1
Abstract:
An electron stacking imaging method and apparatus for automatically correcting the deviation of a zone axis of a sample, the method comprising: scanning a sample by means of an electron beam, and collecting a diffraction pattern of each scanning point of the sample (S1); initializing an object function and an electron beam function, constructing a forward propagation model according to a propagation function between sample layers, and calculating a loss function of the forward propagation model, wherein variable parameters of the propagation function between the sample layers comprise a deviation angle of a sample zone axis relative to an electron beam direction (S2); solving gradients of the loss function regarding parameters to be optimized, and optimizing, according to the gradients, the parameters to be optimized (S3); and returning to execute initializing an object function and an electron beam function, constructing a forward propagation model according to a propagation function between sample layers, and re-calculating a loss function of the forward propagation model until an iteration termination condition is met, and outputting the optimized parameters (S4).
More Like This:
Inventors:
YU RONG (CN)
SHA HAOZHI (CN)
CUI JIZHE (CN)
SHA HAOZHI (CN)
CUI JIZHE (CN)
Application Number:
PCT/CN2022/110146
Publication Date:
February 09, 2023
Filing Date:
August 04, 2022
Export Citation:
Assignee:
UNIV TSINGHUA (CN)
International Classes:
G01N23/2055
Domestic Patent References:
| WO2016019324A2 | 2016-02-04 | |||
| WO2018102792A1 | 2018-06-07 |
Foreign References:
| CN113720865A | 2021-11-30 | |||
| CN111179371A | 2020-05-19 | |||
| CN104081292A | 2014-10-01 | |||
| CN107796837A | 2018-03-13 | |||
| CN110687142A | 2020-01-14 | |||
| US10446366B1 | 2019-10-15 | |||
| US20200135427A1 | 2020-04-30 |
Other References:
PAN AN, ZHANG XIAO-FEI, WANG BIN, ZHAO QING, SHI YI-SHI: "Experimental study on three-dimensional ptychography for thick sample", ACTA PHYSICA SINICA, vol. 65, no. 1, 1 January 2016 (2016-01-01), pages 014204 - 16 (130), XP093032862, ISSN: 1000-3290, DOI: 10.7498/aps.65.014204
Attorney, Agent or Firm:
ACIP LAW OFFICES (CN)
Download PDF: