Title:
ELECTRON TUBE
Document Type and Number:
WIPO Patent Application WO/2014/038318
Kind Code:
A1
Abstract:
An electron tube (1) is configured to form an electric resistance film (15) having a laminate structure of an electric insulating layer and a conductive layer with respect to a holding surface (12a) of a base body (14) for an insulating substrate (12). The electric resistance film (15) is formed as a strong and dense film having a desired resistance value by using an atomic layer deposition method, thereby suppressing the charging of the base body (14) formed of an insulating material. Thus, withstand voltage characteristics can be stably secured.
Inventors:
NAGATA TAKAAKI (JP)
HAMANA YASUMASA (JP)
NAKAMURA KIMITSUGU (JP)
HAMANA YASUMASA (JP)
NAKAMURA KIMITSUGU (JP)
Application Number:
PCT/JP2013/070736
Publication Date:
March 13, 2014
Filing Date:
July 31, 2013
Export Citation:
Assignee:
HAMAMATSU PHOTONICS KK (JP)
International Classes:
H01J43/00
Foreign References:
| US4604545A | 1986-08-05 | |||
| JP2010267414A | 2010-11-25 | |||
| JP2012094660A | 2012-05-17 | |||
| JP2010199449A | 2010-09-09 | |||
| JP2011501877A | 2011-01-13 | |||
| JP2003226970A | 2003-08-15 | |||
| JP2011082301A | 2011-04-21 |
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (JP)
Yoshiki Hasegawa (JP)
Yoshiki Hasegawa (JP)
Download PDF:
Previous Patent: ELECTRON TUBE
Next Patent: IMAGE DATA OUTPUT CONTROL DEVICE, DISPLAY DEVICE, PROGRAM, AND RECORDING MEDIUM THEREFOR
Next Patent: IMAGE DATA OUTPUT CONTROL DEVICE, DISPLAY DEVICE, PROGRAM, AND RECORDING MEDIUM THEREFOR