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Patent Searching and Data


Title:
ELECTRONIC BEAM APPARATUS AND DEVICE PRODUCTION METHOD
Document Type and Number:
WIPO Patent Application WO/2018/155543
Kind Code:
A1
Abstract:
This electron beam apparatus comprises an optical system (80) which directs a plurality of light beams onto a photoelectric element (54), an electron beam optical system (70) which irradiates a wafer (W) with, as a plurality of electron beams, electrons discharged from the photoelectric element as a result of the plurality of light beams being directed onto the photoelectric element, and vacuum chambers (34, 72) having the electron discharge surface of the photoelectric element and a second optical system positioned therein, wherein the vacuum chambers can be switched between a first state in which the path of electrons discharged from the electron discharge surface between the electron discharge surface and the electron beam optical system is a vacuum, and a second state in which, while maintaining the state in which the electron discharge surface is facing the vacuum space, the path is at least partly open to the atmosphere.

Inventors:
SATO, Shinji (15-3 Konan 2-chome, Minato-k, Tokyo 90, 〒1086290, JP)
Application Number:
JP2018/006408
Publication Date:
August 30, 2018
Filing Date:
February 22, 2018
Export Citation:
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Assignee:
NIKON CORPORATION (15-3, Konan 2-chome Minato-k, Tokyo 90, 〒1086290, JP)
International Classes:
H01L21/027; G03F7/20; H01J37/04; H01J37/06; H01J37/073; H01J37/16; H01J37/20; H01J37/305
Foreign References:
JP2005332922A2005-12-02
JPH07254539A1995-10-03
US20120223245A12012-09-06
JP2015133400A2015-07-23
JP2003045368A2003-02-14
JP2015022810A2015-02-02
JP2007080697A2007-03-29
JP2002313214A2002-10-25
Attorney, Agent or Firm:
TATEISHI, Atsuji (TATEISHI & CO, Karakida Center Bldg. 1-53-9, Karakida, Tama-sh, Tokyo 35, 〒2060035, JP)
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