Title:
ELECTRONIC COMPONENT CLEANING DEVICE AND CLEANING METHOD
Document Type and Number:
WIPO Patent Application WO/2011/055502
Kind Code:
A1
Abstract:
Multiple spray units spray a cleaning liquid at multiple spray regions sandwiching a cleaning site of an electronic component. The multiple spraying regions extend linearly, and the spray units have a spray pattern wherein the spray direction seen from the direction of extension of the spray regions is perpendicular to the plane containing the spray regions. The spray units are disposed such that the spray regions are parallel to each other. Sprayed from the spray units, the cleaning liquid collides with the spray regions, creating a flow of cleaning liquid flowing toward the cleaning site.
Inventors:
NISHIGAKI, Taishi (())
Application Number:
JP2010/006241
Publication Date:
May 12, 2011
Filing Date:
October 21, 2010
Export Citation:
Assignee:
ARAKAWA CHEMICAL INDUSTRIES, LTD. (3-7Hiranomachi 1-Chome, Chuo-kuOsaka-sh, Osaka 46, 〒5410046, JP)
荒川化学工業株式会社 (〒46 大阪府大阪市中央区平野町１丁目３番７号 Osaka, 〒5410046, JP)
荒川化学工業株式会社 (〒46 大阪府大阪市中央区平野町１丁目３番７号 Osaka, 〒5410046, JP)
International Classes:
B08B3/02; C23G3/00; H01L21/304
Attorney, Agent or Firm:
OKADA, Kazuhide (Chiyoda Bldg. Kitakan, 13-38 Naniwa-cho,Kita-ku, Osaka-sh, Osaka 22, 〒5300022, JP)