ELECTRONIC DEVICE INCLUDING MULTIPLE CAPACITANCE VALUE MEMS CAPACITOR AND ASSOCIATED METHODS

Title:

ELECTRONIC DEVICE INCLUDING MULTIPLE CAPACITANCE VALUE MEMS CAPACITOR AND ASSOCIATED METHODS

Document Type and Number:

WIPO Patent Application WO2002043089

Kind Code:

A3

Abstract:

An electronic device, such as a filter of phase shifter, for example, includes a substrate, and a MEMS capacitor on the substrate and having a plurality of selectable capacitance values. The MEMS capacitor includes a lower capacitor electrode on the substrate, and a movable bridge comprising end portions connected to the substrate laterally adjacent the lower capacitor electrode. The movable bridge may also include a conductive medial portion between the end portions defining an upper capacitor electrode suspended above the lower capacitor electrode and being movable between an upper position and a lower position by an electrostatic force generated between the capacitor electrodes. Moreover, the movable bridge may further include at least one trovel limiting portion between the end portions for engaging adjacent sustrate portions to keep the upper capacitor electrode in a predetermined spaced relation from the lower capacitor electrode when in the lower position.

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Inventors:

ADKINS CALVIN
TAMMEN DAVID
GRIBBONS MICHAEL
REED JASON
HILBERT CLAUDE
NELSON RICHARD

Application Number:

PCT/US2001/044472

Publication Date:

February 26, 2004

Filing Date:

November 27, 2001

Export Citation:

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Assignee:

HARRIS CORP (US)

International Classes:

B81B3/00; H01G5/16; (IPC1-7): H01G5/16

Foreign References:

EP0928959A2	1999-07-14
US5750420A	1998-05-12
EP0986077A2	2000-03-15

Other References:

CHEN L-Y ET AL: "An isolation technology for joined tungsten MEMS", PROCEEDINGS OF THE WORKSHOP ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS) FORT LAUDERDALE, FEB. 7 - 10, 1993, NEW YORK, IEEE, US, vol. WORKSHOP 6, 7 February 1993 (1993-02-07), pages 189 - 194, XP010111041, ISBN: 0-7803-0957-X

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