Title:
ELECTRONIC DEVICE MANUFACTURING APPARATUS AND ELECTRONIC DEVICE MANUFACTURING METHOD USING SAME
Document Type and Number:
WIPO Patent Application WO/2011/121665
Kind Code:
A1
Abstract:
Disclosed is an electronic device manufacturing apparatus employing an in-line system, wherein particles are prevented from flowing out from a film-forming chamber into a process chamber of the subsequent step.
A buffer chamber is disposed between the film-forming chamber and the process chamber of the subsequent-step by having gate valves therebetween, and the particles generated in the film-forming chamber are removed in the buffer chamber by releasing air by independently opening/closing the gate valves in front of and at the rear of the buffer chamber.
Inventors:
SHIBA, Takashi (5-1 Kurigi 2-chome, Asao-ku, Kawasaki-sh, Kanagawa 50, 〒2158550, JP)
柴高志 (〒50 神奈川県川崎市麻生区栗木２丁目５番１号 キヤノンアネルバ株式会社内 Kanagawa, 〒2158550, JP)
柴高志 (〒50 神奈川県川崎市麻生区栗木２丁目５番１号 キヤノンアネルバ株式会社内 Kanagawa, 〒2158550, JP)
Application Number:
JP2010/002369
Publication Date:
October 06, 2011
Filing Date:
March 31, 2010
Export Citation:
Assignee:
CANON ANELVA CORPORATION (5-1 Kurigi 2-chome, Asao-ku Kawasaki-sh, Kanagawa 50, 〒2158550, JP)
キヤノンアネルバ株式会社 (〒50 神奈川県川崎市麻生区栗木２丁目５番１号 Kanagawa, 〒2158550, JP)
SHIBA, Takashi (5-1 Kurigi 2-chome, Asao-ku, Kawasaki-sh, Kanagawa 50, 〒2158550, JP)
キヤノンアネルバ株式会社 (〒50 神奈川県川崎市麻生区栗木２丁目５番１号 Kanagawa, 〒2158550, JP)
SHIBA, Takashi (5-1 Kurigi 2-chome, Asao-ku, Kawasaki-sh, Kanagawa 50, 〒2158550, JP)
International Classes:
C23C16/44; B65G49/07; C23C14/56; H01L21/677
Attorney, Agent or Firm:
WATANABE, Keisuke et al. (6th Floor, Mitsui Sumitomo Ginko Okachimachi Bldg.11-4, Taito 4-chom, Taito-ku Tokyo 16, 〒1100016, JP)
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Claims:
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