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Title:
ELECTRONIC DEVICE AND METHOD FOR MANUFACTURING SAME
Document Type and Number:
WIPO Patent Application WO/2013/145260
Kind Code:
A1
Abstract:
An electronic device has: a first electrode (22a) that is formed on a substrate (10); a second electrode (24a) that is formed in such a way as to face the first electrode; and a sealing layer (32) that is formed in such a way as to cover the first electrode and the second electrode, and seals a movable space (36) for the first electrode. The movable space is connected with a through opening (18) formed in the substrate, and the electronic device additionally has a sealing member (38) that seals the through opening.

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Inventors:
NAKATANI TADASHI (JP)
OKUDA HISAO (JP)
KATSUKI TAKASHI (JP)
Application Number:
PCT/JP2012/058576
Publication Date:
October 03, 2013
Filing Date:
March 30, 2012
Export Citation:
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Assignee:
FUJITSU LTD (JP)
NAKATANI TADASHI (JP)
OKUDA HISAO (JP)
KATSUKI TAKASHI (JP)
International Classes:
B81B3/00; B81C1/00; H01L23/02; H01L23/06
Foreign References:
JP2008544867A2008-12-11
JP2006147995A2006-06-08
JP2008183636A2008-08-14
JP2010123679A2010-06-03
US20070281381A12007-12-06
JP2011176426A2011-09-08
JP2011228548A2011-11-10
JP2011188330A2011-09-22
JP2007305856A2007-11-22
JP2010108836A2010-05-13
JP2004255487A2004-09-16
Attorney, Agent or Firm:
KITANO, Yoshihito (JP)
Kitano Yoshito (JP)
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