Title:
ELECTRONIC DEVICE AND METHOD OF TESTING AND OF MANUFACTURING
Document Type and Number:
WIPO Patent Application WO2003017479
Kind Code:
A3
Abstract:
The electronic device (10) comprises a capacitor (12) and an inductor (11) and is present on a substrate (1) with an unplanarized surface (2). This is realized in winding (21) of the inductor (11) has a thickness of at least 1 micron and has a planarized upper surface (81). The upper electrode (32) of the capacitor is present in a second electrode layer (6) and has a lower surface (82) which is spaced from the substrate (1) by a larger distance than the upper surface (81) of the lower electrode (31). The second electrode layer (6) preferably includes a second winding (22) of the inductor (11). The electronic device (10) is suitable for use at high frequencies.
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Inventors:
VAN BEEK JOZEF T M (NL)
RIJKS THEODOOR G S M (NL)
MATTERS-KAMMERER MARION K (NL)
VAN ESCH HENRICUS A (NL)
RIJKS THEODOOR G S M (NL)
MATTERS-KAMMERER MARION K (NL)
VAN ESCH HENRICUS A (NL)
Application Number:
PCT/IB2002/003230
Publication Date:
May 06, 2004
Filing Date:
August 14, 2002
Export Citation:
Assignee:
KONINKL PHILIPS ELECTRONICS NV (NL)
VAN BEEK JOZEF T M (NL)
RIJKS THEODOOR G S M (NL)
MATTERS-KAMMERER MARION K (NL)
VAN ESCH HENRICUS A (NL)
VAN BEEK JOZEF T M (NL)
RIJKS THEODOOR G S M (NL)
MATTERS-KAMMERER MARION K (NL)
VAN ESCH HENRICUS A (NL)
International Classes:
G01R27/26; H01F17/00; H01F27/00; H01G4/40; H01L21/02; H01F41/00; H01L23/64; H01L27/08; H03H5/02; H03H7/01; H03H7/42; H03H9/24; H01F27/28; (IPC1-7): H03H7/01; H01L23/64; H01L21/02; H03H7/42; H01F17/00; G01R27/26
Foreign References:
| US5529831A | 1996-06-25 | |||
| EP1063661A1 | 2000-12-27 | |||
| EP0875928A2 | 1998-11-04 |
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