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Patent Searching and Data


Title:
ELECTRONIC DEVICE
Document Type and Number:
WIPO Patent Application WO2005064701
Kind Code:
A8
Abstract:
The microelectromechanical system (MEMS) element (101) comprises a first electrode (31) that is present on a surface of a substrate (30) and a movable element (40), which overlies at least partially the first electrode (31) and comprises a piezoelectric actuator, which movable element (40) is movable towards and from the substrate (30) by application of an actuation voltage between a first and a second position, in which the first position is separated from the substrate (30) by a gap. The piezoelectric actuator comprises a piezoelectric layer (25) which opposite surfaces is provided with a second and a third electrode (21,22) respectively, said second electrode (21) facing the substrate (30) and said third electrode (22) forming an input electrode of the MEMS element (101), so that a current path through the MEMS element (101) comprises the piezoelectric layer . The microelectromechanical system (MEMS) element (101) comprises a first electrode (31) that is present on a surface of a substrate (30) and a movable element (40). This overlies at least partially the first electrode (31) and comprises a piezoelectric actuator, which movable element (40) is movable towards and from the substrate (30) by application of an actuation volatge between a first and a second poistion, in which first position it is separated from the substrate (30) by a gap. Herein the piezoelectric actuator comprises a piezoelectric layer (25) that is on opposite surfaces provided with a second and a third electrode (21,22) respectively, said second electrode (21) facing the substrate (30) and said third electrode (22) forming an input electrode of the MEMS element (101), so that a current path between through the MEMS element (101), comprises the piezoelectric layer (25) and the tunable gap.

Inventors:
KLEE MAREIKE K (DE)
RIJKS THEODOOR G S M (NL)
LOK PIETER (NL)
MAUCZOK RUEDIGER G (DE)
Application Number:
IB2004052868W
Publication Date:
October 26, 2006
Filing Date:
December 20, 2004
Export Citation:
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Assignee:
KONINKLIJKE PHILIPS ELECTRONICS N.V.
PHILIPS INTELLECTUAL PROPERTY & STANDARDS GMBH
KLEE, MAREIKE, K.
RIJKS, THEODOOR, G., S., M.
LOK, PIETER
MAUCZOK, RUEDIGER, G.
International Classes:
H01G5/16; H01H57/00; H01L41/09; H01H1/00
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