Title:
ELECTRONIC MICROSCOPE DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/239546
Kind Code:
A1
Abstract:
In the present invention, an electro-optical condition generation unit includes: a condition setting unit that sets, as a plurality of electro-optical conditions, a plurality of electro-optical conditions in which the combinations of the aperture angle and focal-point height for an electron beam are different; an index calculating unit that determines a measurement-performance index in the electro-optical conditions set by the condition setting unit; and a condition deriving unit that derives an electro-optical condition, including an aperture angle and a focal-point height, so that the measurement-performance index determined by the index calculating unit becomes a prescribed value.
Inventors:
NISHIHATA TAKAHIRO (JP)
OSAKI MAYUKA (JP)
SUN WEI (JP)
YAMAMOTO TAKUMA (JP)
OSAKI MAYUKA (JP)
SUN WEI (JP)
YAMAMOTO TAKUMA (JP)
Application Number:
PCT/JP2018/022758
Publication Date:
December 19, 2019
Filing Date:
June 14, 2018
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
H01J37/21; G01B15/00; H01J37/22; H01L21/66
Domestic Patent References:
| WO2010026833A1 | 2010-03-11 | |||
| WO2011148975A1 | 2011-12-01 |
Foreign References:
| JPS57173258U | 1982-11-01 | |||
| JP2007227207A | 2007-09-06 | |||
| JP2017016755A | 2017-01-19 | |||
| JP2006107919A | 2006-04-20 |
Attorney, Agent or Firm:
SEIRYO I.P.C. (JP)
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