Title:
ELECTRONIC PART AND MANUFACTURING METHOD THEREOF
Document Type and Number:
WIPO Patent Application WO/2006/003933
Kind Code:
A1
Abstract:
An electronic part includes: a substrate; a comb-shaped electrode having a plurality of electrode fingers arranged parallel to one another on the upper surface of the substrate; and a protection film formed on the substrate so as to cover the comb-shaped electrode. The protection film is not flat, i.e., it has convex portions at the positions corresponding to the electrode fingers and concave portions between these convex portions. The cross section of the protection film in the direction orthogonal to the extending direction of the electrode fingers has a shape of a curve having downward convex portions between apexes of the upward convex portions.
Inventors:
TAKAYAMA RYOUICHI
IWASAKI YUKIO
IWASAKI YUKIO
Application Number:
PCT/JP2005/011942
Publication Date:
January 12, 2006
Filing Date:
June 29, 2005
Export Citation:
Assignee:
MATSUSHITA ELECTRIC IND CO LTD (JP)
TAKAYAMA RYOUICHI
IWASAKI YUKIO
TAKAYAMA RYOUICHI
IWASAKI YUKIO
International Classes:
H01L41/09; H01L41/18; H01L41/23; H03H3/08; H03H9/145; (IPC1-7): H03H9/145; H03H3/10
Domestic Patent References:
| WO1996004713A1 | 1996-02-15 |
Foreign References:
| JPS61117913A | 1986-06-05 | |||
| JPH09186542A | 1997-07-15 | |||
| JPH09107268A | 1997-04-22 | |||
| JPH1187655A | 1999-03-30 | |||
| JP2004107688A | 2004-04-08 | |||
| JPH09167936A | 1997-06-24 | |||
| JPH084713A | 1996-01-09 |
Other References:
See also references of EP 1768255A4
Attorney, Agent or Firm:
Kotani, Etsuji (2-2 Nakanoshima 2-chome, Kita-k, Osaka-shi Osaka05, JP)
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