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Patent Searching and Data


Title:
ELECTROPLATING JIG AND ELECTROPLATING METHOD
Document Type and Number:
WIPO Patent Application WO/2016/190180
Kind Code:
A1
Abstract:
Provided are an electroplating jig and an electroplating method in which leaking of fluid does not readily occur. A workpiece (2) is disposed between a first insulation body (20) in which an opening (22) that passes through the principal surface thereof is formed, and a second insulation body (30), such that the workpiece (2) faces the opening (22) and the area surrounding same. The pressure inside a first space (70), which is enclosed by an annular first seal member (50) for sealing the gap between the first insulation body (20) and the workpiece (2), an annular second seal member (52) for sealing the gap between the second insulation body (30) and the first insulation body (20) surrounding the workpiece (2), an annular third seal member (54) for sealing the gap between the workpiece (2) and the second insulation body (30), the first insulation body (20), the second insulation body (30), and the workpiece (2) is brought higher than the pressure inside a second space (74), which is enclosed by the third seal member (54), the second insulation body (30), and the workpiece (2).

Inventors:
NAKAYAMA Naoki (10-1, Higashikotari 1-chome, Nagaokakyo-sh, Kyoto 55, 〒6178555, JP)
YAMADA Naohiro (10-1, Higashikotari 1-chome, Nagaokakyo-sh, Kyoto 55, 〒6178555, JP)
YAMANE Shigeki (10-1, Higashikotari 1-chome, Nagaokakyo-sh, Kyoto 55, 〒6178555, JP)
Application Number:
JP2016/064692
Publication Date:
December 01, 2016
Filing Date:
May 18, 2016
Export Citation:
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Assignee:
MURATA MANUFACTURING CO., LTD. (10-1, Higashikotari 1-chome Nagaokakyo-sh, Kyoto 55, 〒6178555, JP)
International Classes:
C25D17/06; C25D5/02; C25D17/08
Foreign References:
JP2014505163A2014-02-27
JP2006233296A2006-09-07
Attorney, Agent or Firm:
YAMAMOTO Toshinori (SHINGIJUTSU PATENT OFFICE, Room 810 Kondo-bldg., 4-12, Nishitenma 4-chome, Kita-ku, Osaka-sh, Osaka 47, 〒5300047, JP)
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