Title:
ELECTROSTATIC ACTUATOR AND PHYSICAL QUANTITY SENSOR
Document Type and Number:
WIPO Patent Application WO/2019/240007
Kind Code:
A1
Abstract:
An electrostatic actuator, provided with a fixed electrode (1) and a movable electrode (2) disposed so as to face the fixed electrode (1). The movable electrode (2) is displaceable relative to the fixed electrode (1) and a fixed part (3). An attraction force acts between the movable electrode (2) and the fixed part (3). In the electrostatic actuator, a non-linear vibration of the movable electrode (2) when a voltage is applied to the fixed electrode (1) and the movable electrode (2) is reduced by the attraction force acting between the movable electrode (2) and the fixed part (3).
Inventors:
HARADA SHOTA (JP)
ITO KEITARO (JP)
JOMORI TOMOYA (JP)
YAMADA HIDEO (JP)
INAGAKI YUUKI (JP)
AKASHI TERUHISA (JP)
HATA YOSHIYUKI (JP)
ITO KEITARO (JP)
JOMORI TOMOYA (JP)
YAMADA HIDEO (JP)
INAGAKI YUUKI (JP)
AKASHI TERUHISA (JP)
HATA YOSHIYUKI (JP)
Application Number:
PCT/JP2019/022550
Publication Date:
December 19, 2019
Filing Date:
June 06, 2019
Export Citation:
Assignee:
DENSO CORP (JP)
International Classes:
H02N11/00; B06B1/04; B81B3/00; G01C19/5747; H01L29/84
Foreign References:
| JP2014011531A | 2014-01-20 |
Attorney, Agent or Firm:
YOU-I PATENT FIRM (JP)
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