Title:
ELECTROSTATIC ACTUATOR AND SWITCH
Document Type and Number:
WIPO Patent Application WO/2016/121214
Kind Code:
A1
Abstract:
This electrostatic actuator is provided with: a base section; a movable electrode, which is configured by including a semiconductor, and is supported to the base section such that the movable electrode can be displaced in the first direction; and a fixed electrode, which is configured by including a semiconductor, is fixed to the base section, and faces the movable electrode in a state of being separated from the movable electrode in the first direction. The electrostatic actuator has a high resistance region, which is formed as a part of a facing surface of the movable electrode and/or that of the fixed electrode, and which has an impurity concentration lower than that of a region surrounding the high resistance region.
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Inventors:
MORITA SHINYA (JP)
IKEDA KOICHI (JP)
IKEDA KOICHI (JP)
Application Number:
PCT/JP2015/083447
Publication Date:
August 04, 2016
Filing Date:
November 27, 2015
Export Citation:
Assignee:
SONY CORP (JP)
International Classes:
H02N1/00; B81B3/00; H01H59/00
Domestic Patent References:
WO2005015595A1 | 2005-02-17 |
Foreign References:
JP2002228680A | 2002-08-14 | |||
JP2009113128A | 2009-05-28 |
Attorney, Agent or Firm:
TSUBASA PATENT PROFESSIONAL CORPORATION (JP)
Patent business corporation wings international patent firm (JP)
Patent business corporation wings international patent firm (JP)
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