ELECTROSTATIC ACTUATOR

Title:

ELECTROSTATIC ACTUATOR

Document Type and Number:

WIPO Patent Application WO/1991/016757

Kind Code:

A1

Abstract:

An electrostatic actuator comprising a first member (1) having plural strip-like electrodes (4) which are insulated from each other and arranged in a predetermined direction and at predetermined spaces, a second member (10) whose surface facing the surface of the first member is in contact with it and made of a resistive substance, and a controlling means (11) which changes the voltages applied to the respective strip-like electrodes. The controlling means applies a predetermined voltage pattern of pulse voltages to the strip-like electrodes and causes the first and second members to move relatively to each other. The resistive substance in the second member is so selected that the time constant which is determined mainly by the volume resistivity and the dielectric constant of the substance is the double of the time being necessary in order that at least one of the first and second member moves relatively by the distance equal to the length between the electrodes.

Inventors:

HIGUCHI TOSHIRO (JP)
EGAWA SAKU (JP)
HIYANE MASAO (JP)
NATORI KATSUHIDE (JP)

Application Number:

PCT/JP1991/000497

Publication Date:

October 31, 1991

Filing Date:

April 16, 1991

Export Citation:

Click for automatic bibliography generation Help

Assignee:

FUJITSU LTD (JP)
HIGUCHI TOSHIRO (JP)

International Classes:

B03C7/02; B03C7/04; H02N1/00; (IPC1-7): H02N1/00

Foreign References:

JPS6387181A	1988-04-18
JPS5662077A	1981-05-27
JPS322256B1	1957-04-12
JPS285260B1	1953-10-14

Other References: