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Title:
ELECTROSTATIC ADSORPTION APPARATUS
Document Type and Number:
WIPO Patent Application WO/2012/090430
Kind Code:
A1
Abstract:
Provided, with a simple structure, is an electrostatic adsorption apparatus equipped with: sufficient electrostatic adsorption force even when the substrate to be adsorbed is a glass substrate made of insulation material; and an electrostatic adsorption chuck from which a substrate can be removed quickly. The electrostatic adsorption apparatus is equipped with: a dielectric plate on the surface of which is formed a plurality of protruded sections that can support a substrate with the apex faces thereof, and recess sections surrounding the protruded sections; an electrode formed within the dielectric plate; and a first external power supply for applying a substrate adsorption voltage to the electrode. The protruded sections are provided with conductor cover-films on at least the apex faces thereof, and the first external power supply is provided with a substrate-desorption-voltage power supply that can apply, to the electrode, an inverse voltage having a polarity that is inverse with respect to the polarity of the substrate adsorption voltage to be applied to the electrode, upon desorbing the substrate. The conductor cover-films are connected to a second external power supply provided with another substrate-desorption-voltage power supply that can apply, to the conductor cover-films, an inverse voltage having a polarity that is inverse with respect to the polarity of the substrate adsorption voltage to be applied the electrode, upon desorbing the substrate.

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Inventors:
MORIMOTO EITARO (JP)
Application Number:
PCT/JP2011/007094
Publication Date:
July 05, 2012
Filing Date:
December 20, 2011
Export Citation:
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Assignee:
CANON ANELVA CORP (JP)
MORIMOTO EITARO (JP)
International Classes:
H01L21/683
Foreign References:
JP2009272646A2009-11-19
JP2007173596A2007-07-05
JP2005032858A2005-02-03
JP2006157032A2006-06-15
Attorney, Agent or Firm:
OHTSUKA, Yasunori et al. (JP)
Yasunari Otsuka (JP)
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