Title:
ELECTROSTATIC CHUCK APPARATUS
Document Type and Number:
WIPO Patent Application WO/2006/117871
Kind Code:
A1
Abstract:
An electrostatic chuck apparatus is recovered to attract a work in a short time by a simple process. An electrode (1) is divided into a plurality of areas (1a) within a plane parallel to the work (W), independent electrode patterns (1b) are arranged for the areas (1a), respectively, power supply sections (1c) for the electrode patterns (1b) are arranged in the areas (1a), respectively, and power supply to the electrode pattern (1b) arranged on the discretionary area (1a) is partially stopped by cutting the discretionary power supply section (1c). Thus, even when a part of a film plane in the areas (1a) is destroyed, though the electrode pattern (1b) in the destroyed area (1a) selectively does not function as an electrostatic chuck, the electrode patterns (1b) in other areas (1a) function as electrostatic chucks.
Inventors:
OHTANI YOSHIKAZU (JP)
Application Number:
PCT/JP2005/008227
Publication Date:
November 09, 2006
Filing Date:
April 28, 2005
Export Citation:
Assignee:
SHINETSU ENG CO LTD (JP)
OHTANI YOSHIKAZU (JP)
OHTANI YOSHIKAZU (JP)
International Classes:
H01L21/68; B24B41/06; H01L21/683; H02N13/00
Foreign References:
| JPH05291562A | 1993-11-05 |
Attorney, Agent or Firm:
Hosoi, Sadayuki (14-7 Hakusan 5-chome, Bunkyo-k, Tokyo 01, JP)
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