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Title:
ELECTROSTATIC CHUCK DEVICE AND METHOD FOR PRODUCING ELECTROSTATIC CHUCK DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/163757
Kind Code:
A1
Abstract:
An electrostatic chuck device which is provided with: a stage that has a stage surface on which a plate-like sample is placed; an annular focus ring; and a cooling means that cools the focus ring. The stage has a holding part which is provided so as to surround the stage surface; and the holding part is provided with an annular groove that surrounds the stage surface and a through hole that opens to the bottom surface of the groove. A cylindrical insulator is inserted into the through hole. The upper surface of the holding part on both sides of the groove in the width direction serves as a holding surface that is in contact with the focus ring and holds the focus ring; and the holding surface satisfies the conditions (i)-(iii) described below. (i) The holding surface has a surface roughness of 0.05 μm or less. (ii) The holding surface has a flatness of 20 μm or less. (iii) The holding surface does not have a recess which extends in the direction that is perpendicular to the holding surface, and which has a depth of 1.0 μm or more.

Inventors:
KUGIMOTO Hironori (6-28, Rokubancho, Chiyoda-k, Tokyo 65, 〒1028465, JP)
OZAKI Masaki (6-28, Rokubancho, Chiyoda-k, Tokyo 65, 〒1028465, JP)
WATANABE Takeshi (6-28, Rokubancho, Chiyoda-k, Tokyo 65, 〒1028465, JP)
TAKAHASHI Kentaro (6-28, Rokubancho, Chiyoda-k, Tokyo 65, 〒1028465, JP)
Application Number:
JP2019/006059
Publication Date:
August 29, 2019
Filing Date:
February 19, 2019
Export Citation:
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Assignee:
SUMITOMO OSAKA CEMENT CO., LTD. (6-28, Rokubancho Chiyoda-k, Tokyo 65, 〒1028465, JP)
International Classes:
H01L21/3065; H01L21/683; H02N13/00
Attorney, Agent or Firm:
NISHIZAWA Kazuyoshi et al. (1-9-2, Marunouchi Chiyoda-k, Tokyo 20, 〒1006620, JP)
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