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Title:
ELECTROSTATIC CHUCK HEATER
Document Type and Number:
WIPO Patent Application WO/2017/170374
Kind Code:
A1
Abstract:
An electrostatic chuck heater comprises a sheet heater 30 which is disposed between an electrostatic chuck and a support base and which includes a heater wire 34 buried in a resin sheet 32. The heater wire 34 is provided in each of a number of zones Z1 of the resin sheet 32, and constituted by a copper wire which is wired so as to extend throughout the zone Z1 in a single stroke fashion from one end 34a to the other end 34b.

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Inventors:
KIN RISHUN (JP)
TAKEBAYASHI HIROSHI (JP)
HIRATA NATSUKI (JP)
Application Number:
PCT/JP2017/012345
Publication Date:
October 05, 2017
Filing Date:
March 27, 2017
Export Citation:
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Assignee:
NGK INSULATORS LTD (JP)
International Classes:
H01L21/683
Foreign References:
JP2004533098A2004-10-28
JP2005159018A2005-06-16
JP2000150119A2000-05-30
JP2004022476A2004-01-22
Attorney, Agent or Firm:
ITEC INTERNATIONAL PATENT FIRM (JP)
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