Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
ELECTROSTATIC CHUCK HEATER
Document Type and Number:
WIPO Patent Application WO/2020/262368
Kind Code:
A1
Abstract:
An electrostatic chuck heater comprises: an electrostatic chuck in which an electrostatic electrode is embedded in a ceramic sintered body; a cooling member that cools the electrostatic chuck; and a heater layer which is provided between the electrostatic chuck and the cooling member and in which a plurality of metal layers including a resistance heating element layer is embedded in multiple stages. The heater layer has a ceramic insulating layer having a thickness of 2-50 μm (inclusive) between the metal layers.

Inventors:
KUNO TATSUYA (JP)
TAKEBAYASHI HIROSHI (JP)
AIKAWA KENICHIRO (JP)
Application Number:
PCT/JP2020/024573
Publication Date:
December 30, 2020
Filing Date:
June 23, 2020
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
NGK INSULATORS LTD (JP)
International Classes:
H05B3/74; H01L21/683
Domestic Patent References:
WO2015198942A12015-12-30
Foreign References:
JP2015515713A2015-05-28
JP2013235879A2013-11-21
JP2012119120A2012-06-21
JP2009170509A2009-07-30
JP2009067662A2009-04-02
Attorney, Agent or Firm:
ITEC INTERNATIONAL PATENT FIRM (JP)
Download PDF:
View/Download PDF      PDF Help



 
Previous Patent: Nε-LONG CHAIN ACYLIDINE CRYSTAL PRODUCTION METHOD AND COMPOSITION CONTAINING SAID CRYSTALS

Next Patent: POLYMER COMPOSITION FOR LAMINATION AND LAYERED BODY USING SAME