Title:
ELECTROSTATIC CHUCK AND MANUFACTURING METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2017/209325
Kind Code:
A1
Abstract:
The present invention relates to a method for manufacturing an electrostatic chuck comprising: a base member (330) of a metal material; and a dielectric layer (200), formed on an upper surface of the base member (330), including an electrode layer (340) to the inside of which a DC power is applied. According to the present invention, the dielectric layer (200) is formed of a ceramic material by using at least one selected from among a plasma spraying method and a sol-gel method, and thus can be provided with low porosity to increase in lifespan, and with high permittivity to increase in adhesion force to a substrate.
Inventors:
CHO SAENG HYUN (KR)
Application Number:
PCT/KR2016/005797
Publication Date:
December 07, 2017
Filing Date:
June 01, 2016
Export Citation:
Assignee:
VNI SOLUTION CO LTD (KR)
International Classes:
H01L21/683; B23Q3/15; H02N13/00
Foreign References:
| KR20130110091A | 2013-10-08 | |||
| KR20120120415A | 2012-11-01 | |||
| KR20150088699A | 2015-08-03 | |||
| JP2013258429A | 2013-12-26 | |||
| KR20150136483A | 2015-12-07 |
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