Title:
ELECTROSTATIC CHUCK MEMBER, ELECTROSTATIC CHUCK DEVICE, AND METHOD FOR MANUFACTURING ELECTROSTATIC CHUCK MEMBER
Document Type and Number:
WIPO Patent Application WO/2023/188632
Kind Code:
A1
Abstract:
This electrostatic chuck member has: a substrate, one main surface of which is a placement surface on which a plate-like sample is placed; and an electrostatic adsorption electrode provided on the side opposite to the placement surface or inside the substrate. A side peripheral surface, of the substrate, continuous with the placement surface has at least a first curved surface which is a convex curved surface provided in the circumferential direction at a peripheral edge portion of the placement surface, and a second curved surface provided in the circumferential direction at a height position which differs from the first curved surface.
Inventors:
KINPARA YUUKI (JP)
INUI SATOYOSHI (JP)
ICHIYOSHI TAKU (JP)
SUGAMATA TORU (JP)
INUI SATOYOSHI (JP)
ICHIYOSHI TAKU (JP)
SUGAMATA TORU (JP)
Application Number:
PCT/JP2022/047422
Publication Date:
October 05, 2023
Filing Date:
December 22, 2022
Export Citation:
Assignee:
SUMITOMO OSAKA CEMENT CO LTD (JP)
International Classes:
H01L21/683; H01L21/205; H01L21/3065; H02N13/00
Domestic Patent References:
| WO2019065710A1 | 2019-04-04 |
Foreign References:
| JP2008103403A | 2008-05-01 | |||
| JP2009099897A | 2009-05-07 | |||
| JP2004289137A | 2004-10-14 | |||
| JP2020107881A | 2020-07-09 | |||
| JP2018022871A | 2018-02-08 | |||
| US20050061447A1 | 2005-03-24 | |||
| CN108695225A | 2018-10-23 |
Attorney, Agent or Firm:
NISHIZAWA Kazuyoshi et al. (JP)
Download PDF:
Previous Patent: GLASS COMPOSITION
Next Patent: WATER-ABSORBABLE RESIN COMPOSITION, ABSORBER AND ABSORBENT ARTICLE EACH USING SAME, AND METHOD FOR P...
Next Patent: WATER-ABSORBABLE RESIN COMPOSITION, ABSORBER AND ABSORBENT ARTICLE EACH USING SAME, AND METHOD FOR P...