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Title:
ELECTROSTATIC CHUCK AND METHOD FOR MANUFACTURING ELECTROSTATIC CHUCK
Document Type and Number:
WIPO Patent Application WO/2020/045432
Kind Code:
A1
Abstract:
An electrostatic chuck 1 according to the present disclosure is provided with a plate-like ceramic base 2 and an electrode 3 for electrostatic attraction use. The ceramic base 2 is composed of multiple particles containing aluminum oxide as the main component thereof. The multiple particles include particles each having a magnesium atom and a zirconium atom.

Inventors:
ONO HIROSHI (JP)
Application Number:
PCT/JP2019/033522
Publication Date:
March 05, 2020
Filing Date:
August 27, 2019
Export Citation:
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Assignee:
KYOCERA CORP (JP)
International Classes:
H02N13/00; H01L21/683
Foreign References:
JP2008098626A2008-04-24
JP2000313656A2000-11-14
JPH0214874A1990-01-18
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