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Title:
ELECTROSTATIC CHUCK AND PRODUCTION METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2019/208625
Kind Code:
A1
Abstract:
An electrostatic chuck that has: an insulating substrate having an upper surface; and a layered electrode along the upper surface inside the substrate. The upper surface of the electrode and the substrate are in contact and a vacuum or a gas-filled gap is interposed between the side surface of the electrode and the substrate.

Inventors:
KAWANABE YASUNORI (JP)
OKAWA YOSHIHIRO (JP)
Application Number:
PCT/JP2019/017408
Publication Date:
October 31, 2019
Filing Date:
April 24, 2019
Export Citation:
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Assignee:
KYOCERA CORP (JP)
International Classes:
H01L21/683; H02N13/00
Foreign References:
JP2014093467A2014-05-19
JPH10501925A1998-02-17
JP2017168818A2017-09-21
JP2000277596A2000-10-06
JP2001007189A2001-01-12
JP2006066857A2006-03-09
JP2002368069A2002-12-20
JP2007214339A2007-08-23
JP2016201411A2016-12-01
Attorney, Agent or Firm:
IIJIMA, YASUHIRO (JP)
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