Title:
ELECTROSTATIC CHUCK AND PRODUCTION METHOD FOR ELECTROSTATIC CHUCK
Document Type and Number:
WIPO Patent Application WO/2013/168471
Kind Code:
A1
Abstract:
[Purpose] To provide an electrostatic chuck having a high degree of design freedom and having no defects that occur when adhesive is used; and to provide a production method for the electrostatic chuck. [Solution] An electrostatic chuck (1) that does not use an adhesive, that has reduced volume resistance of heater units (4), and comprises: a base material section (2) constituting a chuck main body; a first insulation layer (3) comprising a sprayed coating film formed on the surface (2a) of the base material section (2); the heater units (4) comprising conductors formed by a conductive paste being coated on the surface (3a) of the first insulation layer (3); a second insulation layer (5) comprising a sprayed coating film formed on the surface (3a) of the first insulation layer (3) so as to cover the heater units (4); an electrode section (6) formed by being sprayed on the surface (5a) of the second insulation layer (5); and a dielectric layer (7) comprising a sprayed coating film formed on the surface (5a) of the second insulation layer (5) so as to cover the electrode section (6).
Inventors:
YAMASAKI RYO (JP)
INABA MITSUHARU (JP)
TAGUCHI KENSUKE (JP)
INABA MITSUHARU (JP)
TAGUCHI KENSUKE (JP)
Application Number:
PCT/JP2013/058208
Publication Date:
November 14, 2013
Filing Date:
March 22, 2013
Export Citation:
Assignee:
TOCALO CO LTD (JP)
International Classes:
H01L21/683; H02N13/00
Foreign References:
| JP2007173828A | 2007-07-05 | |||
| JP2005063991A | 2005-03-10 | |||
| JP2000082695A | 2000-03-21 | |||
| JP2002057207A | 2002-02-22 | |||
| JP2002009138A | 2002-01-11 | |||
| JP2007088411A | 2007-04-05 | |||
| JP2001274229A | 2001-10-05 |
Attorney, Agent or Firm:
TANAKA, ISAO (JP)
Norio Tanaka (JP)
Norio Tanaka (JP)
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