Title:
ELECTROSTATIC CHUCK WITH DIELECTRIC COATING
Document Type and Number:
WIPO Patent Application WO2003008666
Kind Code:
B1
Abstract:
Generally, an electrostatic chuck (102) having a dielectric coating is provided. In one embodiment, an electrostatic chuck (102) includes a support surface (106), a mounting surface (222) disposed opposite the support surface and at least one side (220) separating the support surface and the mounting surface which defines a support body. One or more conductive members (208) are disposed within the support body to generate an electrostatic attraction between the body and a substrate disposed thereon. A dielectric coating (224) is disposed on the mounting surface of the support body to minimize undesired current leakage therethrough. Optionally, the dielectric coating may be additionally disposed on one or more of the sides and/or the support surface.
Inventors:
KHOLODENKO ARNOLD V
CHAFIN MICHAEL G
MAYS BRAD
ISHIKAWA TETSUYA
KUMAR AMANDA H
GRIMARD DENNIS S
CHAFIN MICHAEL G
MAYS BRAD
ISHIKAWA TETSUYA
KUMAR AMANDA H
GRIMARD DENNIS S
Application Number:
PCT/US2002/020660
Publication Date:
March 20, 2003
Filing Date:
July 01, 2002
Export Citation:
Assignee:
APPLIED MATERIALS INC (US)
International Classes:
C23C16/455; C23C16/458; H01L21/683; C23C16/44; (IPC1-7): C23C16/458; H01L21/00; H01L21/68
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