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Title:
ELECTROSTATIC CHUCK WITH POLYMER PROTRUSIONS
Document Type and Number:
WIPO Patent Application WO/2010/132640
Kind Code:
A3
Abstract:
In accordance with an embodiment of the invention, there is provided an electrostatic chuck. The electrostatic chuck comprises a surface layer activated by a voltage in an electrode to form an electric charge to electrostatically clamp a substrate to the electrostatic chuck. The surface layer includes a plurality of polymer protrusions and a charge control layer to which the plurality of polymer protrusions adhere, the plurality of polymer protrusions extending to a height above portions of the charge control layer surrounding the plurality of polymer protrusions to support the substrate upon the plurality of polymer protrusions during electrostatic clamping of the substrate.

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Inventors:
COOKE RICHARD A (US)
RICHARD NATE (US)
DONNELL STEVEN (US)
VOSE MARK (US)
LIU YAN (US)
Application Number:
PCT/US2010/034667
Publication Date:
March 31, 2011
Filing Date:
May 13, 2010
Export Citation:
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Assignee:
ENTEGRIS INC (US)
COOKE RICHARD A (US)
RICHARD NATE (US)
DONNELL STEVEN (US)
VOSE MARK (US)
LIU YAN (US)
International Classes:
H01L21/687; B23Q3/15; H02N13/00
Foreign References:
KR20050064912A2005-06-29
KR20070066890A2007-06-27
KR100755874B12007-09-05
KR20060081562A2006-07-13
Other References:
See also references of EP 2430654A4
Attorney, Agent or Firm:
CARROLL, Alice, O. et al. (Brook Smith & Reynolds, P.C.,530 Virginia Rd.,P.O. Box 913, Concord MA, US)
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