Title:
ELECTROSTATIC CHUCK
Document Type and Number:
WIPO Patent Application WO/2012/014873
Kind Code:
A1
Abstract:
Disclosed is an electrostatic chuck having a power to suppress residual adhesion that does not easily degrade over time. The electrostatic chuck, which is provided with an insulating substrate (2) and an adhesion electrode (3), is characterized by a region containing at least the top surface of the insulating substrate (2) comprising a ceramic containing Mn and containing first transition elements comprising Fe and/or Cr, where the ratio (C2/C1) of the amount (C2) (mol) of the aforementioned first transition elements that are contained to the amount (C1) (mol) of Mn that is contained is at least 1.
Inventors:
ONO,Hiroshi (Kagoshima Kokubu Plant 1-1, Kokubuyamashita-cho, Kirishima-sh, Kagoshima 96, 〒8994396, JP)
Application Number:
JP2011/066924
Publication Date:
February 02, 2012
Filing Date:
July 26, 2011
Export Citation:
Assignee:
KYOCERA CORPORATION (6 Takeda Tobadono-cho, Fushimi-ku Kyoto-sh, Kyoto 01, 〒6128501, JP)
京セラ株式会社 (〒01 京都府京都市伏見区竹田鳥羽殿町６番地 Kyoto, 〒6128501, JP)
京セラ株式会社 (〒01 京都府京都市伏見区竹田鳥羽殿町６番地 Kyoto, 〒6128501, JP)
International Classes:
H01L21/683
Claims: