Title:
ELECTROSTATIC CHUCK
Document Type and Number:
WIPO Patent Application WO/2018/016588
Kind Code:
A1
Abstract:
Provided is an electrostatic chuck which is provided with a ceramic dielectric substrate, a base plate which is arranged at a distance from the ceramic dielectric substrate and supports the ceramic dielectric substrate, and a heater plate which is arranged between the ceramic dielectric substrate and the base plate. The heater plate comprises: first and second supporting plates which are arranged between the ceramic dielectric substrate and the base plate; first and second resin layers which are arranged between the first supporting plate and the second supporting plate; a resin part which is arranged between the first resin layer and the second resin layer; a heater element which is arranged between the first resin layer and the second resin layer, while having a first conductive part, and which generates heat when an electric current is supplied thereto; and a first space which is defined by a first lateral end part of the first conductive part in the in-plane direction, the first resin layer, the second resin layer and the resin part.
Inventors:
KOMATSU MAKOTO (JP)
YAMAGUCHI KOSUKE (JP)
SASAKI HITOSHI (JP)
YOSHII YUICHI (JP)
MAEHATA KENGO (JP)
UEFUJI JUMPEI (JP)
YAMAGUCHI KOSUKE (JP)
SASAKI HITOSHI (JP)
YOSHII YUICHI (JP)
MAEHATA KENGO (JP)
UEFUJI JUMPEI (JP)
Application Number:
PCT/JP2017/026299
Publication Date:
January 25, 2018
Filing Date:
July 20, 2017
Export Citation:
Assignee:
TOTO LTD (JP)
International Classes:
H01L21/683; H02N13/00
Domestic Patent References:
| WO2006009030A1 | 2006-01-26 |
Foreign References:
| JP2016100474A | 2016-05-30 | |||
| JPH1064984A | 1998-03-06 | |||
| JP2011009706A | 2011-01-13 | |||
| JP2011222256A | 2011-11-04 | |||
| JPH08148549A | 1996-06-07 | |||
| JPS62133721A | 1987-06-16 | |||
| JP2011222978A | 2011-11-04 | |||
| JP2011256072A | 2011-12-22 | |||
| JPH08125001A | 1996-05-17 | |||
| JP2001237301A | 2001-08-31 | |||
| JP2013229464A | 2013-11-07 |
Attorney, Agent or Firm:
HYUGAJI, Masahiko et al. (JP)
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