Title:
ELECTROSTATIC CHUCK
Document Type and Number:
WIPO Patent Application WO/2020/153449
Kind Code:
A1
Abstract:
This electrostatic chuck is provided with: an insulation substrate (1) having a sample holding surface; and a support body (2) joined to the insulation substrate (1). A first through-hole (9) provided in the insulation substrate (1) and a second through-hole (7) provided in the support body (2) are in communication with each other to form a gas inflow hole. The second through-hole (7) is provided with a porous member (5). The opening diameter of the opening (substrate side opening) of the second through-hole (7) on the side facing the insulation substrate (1) is larger than the diameter of the first through-hole (9). The opening of the second through-hole (7) and a suction electrode 6 are positioned shifted to each other in a direction parallel to the sample holding surface. That is, the suction electrode (6) and the second through-hole (7) are configured not to be overlapped with each other in plan view.
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Inventors:
FURUKAWA NAOKI (JP)
Application Number:
PCT/JP2020/002411
Publication Date:
July 30, 2020
Filing Date:
January 23, 2020
Export Citation:
Assignee:
KYOCERA CORP (JP)
International Classes:
H02N13/00; H01L21/683
Domestic Patent References:
| WO2016132909A1 | 2016-08-25 | |||
| WO2017213714A1 | 2017-12-14 | |||
| WO2017012653A1 | 2017-01-26 |
Foreign References:
| JP2013243267A | 2013-12-05 | |||
| JP2006344766A | 2006-12-21 | |||
| JP2018101773A | 2018-06-28 | |||
| JP2017162899A | 2017-09-14 | |||
| JP2005268654A | 2005-09-29 | |||
| JP2013232640A | 2013-11-14 | |||
| JP2014209615A | 2014-11-06 |
Attorney, Agent or Firm:
SAIKYO, Keiichiro (JP)
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