Title:
ELECTROSTATIC COMB DRIVE-BASED SILICON-BASED MEMS OPTICAL SWITCH AND N × N ARRAY
Document Type and Number:
WIPO Patent Application WO/2022/062317
Kind Code:
A1
Abstract:
An electrostatic comb drive-based silicon-based MEMS optical switch and an N × N array. The optical switch is primarily constituted by two parts, namely two separated crossing waveguide mirrors (1 and 2) and an electrostatic comb driver. The crossing waveguide mirrors (1 and 2) are constituted by two crossing waveguides and four adiabatic tapered waveguides. The electrostatic comb driver comprises an electrostatic comb, an island spring structure, and a transmission rod (3). The electrostatic comb is a pair of comb teeth structures, a voltage is applied to fixed comb teeth (6) therein, and the other parts remain grounded. Under the effect of an electrostatic force, movable comb teeth (7) move towards the fixed comb teeth (6), a spring (5) distends and pushes via the transmission rod (3) the movable crossing waveguide mirror (2) to move towards the fixed crossing waveguide mirror (1), and the separated crossing waveguide mirrors are recombined into a complete crossing waveguide. By relying on the electrostatic comb driver to regulate an output optical path of the optical switch, a low-loss and high-extinction ratio 2 × 2 optical switch unit and an N × N array are ultimately implemented, and the outstanding advantages of a large bandwidth, low loss, high extinction ratio, low energy consumption, structural simplicity, convenient control, and a simple process are provided.
Inventors:
DAI DAOXIN (CN)
SUN YI (CN)
LI HUAN (CN)
SUN YI (CN)
LI HUAN (CN)
Application Number:
PCT/CN2021/078381
Publication Date:
March 31, 2022
Filing Date:
March 01, 2021
Export Citation:
Assignee:
UNIV ZHEJIANG (CN)
International Classes:
G02B6/35; G02B6/10
Foreign References:
| CN112305676A | 2021-02-02 | |||
| CN110658584A | 2020-01-07 | |||
| CN107678096A | 2018-02-09 | |||
| CN107329209A | 2017-11-07 | |||
| CN108732687A | 2018-11-02 | |||
| US20200041728A1 | 2020-02-06 | |||
| US7054519B1 | 2006-05-30 |
Attorney, Agent or Firm:
HANGZHOU QIUSHI PATENT OFFICE CO., LTD. (CN)
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