Title:
ELECTROSTATIC DEFLECTION CONVERGENCE-TYPE ENERGY ANALYZER, IMAGING-TYPE ELECTRON SPECTROSCOPIC DEVICE, REFLECTING IMAGING-TYPE ELECTRON SPECTROSCOPIC DEVICE, AND SPIN VECTOR DISTRIBUTION IMAGING DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/009995
Kind Code:
A1
Abstract:
Provided is an electrostatic deflection convergence-type energy analyzer that has a wide acceptance angle and high two-dimensional convergence performance, is capable of imaging a two-dimensional real-space image and an emission angle distribution, and enables two-dimensional convergence and imaging at 90°deflection with respect to an incident direction. One or a plurality of outer electrodes and a plurality of inner electrodes are disposed along the shapes of two rotating bodies formed on the inside and the outside of a common rotating axis. The inner-surface shape of the outer electrode has a tapered shape becoming smaller in diameter toward both ends. The outer-surface shape of the inner electrodes has a tapered shape becoming smaller in diameter toward both ends. An electron incident hole and exit hole are formed in each of the outer electrodes at both ends on the rotating axis. The outer electrode and the inner electrodes have applied thereto voltages for accelerating and decelerating electrons in proportion to the energy of incident electrons. One or a plurality of electrodes except for the inner electrodes at both ends have applied thereto a voltage that is at least twice a converted acceleration voltage obtained by converting the energy of electrons into an acceleration voltage with reference to the potential of the outer electrode having the incident hole formed therein.
Inventors:
MATSUDA HIROYUKI (JP)
MATSUI FUMIHIKO (JP)
MATSUI FUMIHIKO (JP)
Application Number:
PCT/JP2021/026052
Publication Date:
January 13, 2022
Filing Date:
July 09, 2021
Export Citation:
Assignee:
INTER UNIV RESEARCH INSTITUTE CORPORATION NATIONAL INSTITUTES OF NATURAL SCIENCES (JP)
International Classes:
G01N23/227; H01J37/05; H01J37/252; H01J49/48
Domestic Patent References:
| WO2019216348A1 | 2019-11-14 | |||
| WO2021125297A1 | 2021-06-24 | |||
| WO2012173007A1 | 2012-12-20 | |||
| WO2012066024A1 | 2012-05-24 |
Foreign References:
| JP4802340B2 | 2011-10-26 | |||
| JP4900389B2 | 2012-03-21 |
Other References:
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ISARI KOUJI, HIROAKI YOSHIDA, TATSUO GEJO, EIICHI KOBAYASHI, KAZUHIKO MASE, SHIN-ICHI NAGAOKA, KENICHIRO TANAKA: "Construction and Evaluation of Coaxially Symmetric Mirror Electron Energy Analyzer with High Sensitivity, and Its Application to Coincidence Spectroscopy", SHINKU / VACUUM SOCIETY OF JAPAN. JOURNAL., NIHON SHINKU KYOKAI, TOKYO, JP, vol. 46, no. 5, 20 May 2003 (2003-05-20), JP , pages 377 - 384, XP055885301, ISSN: 0559-8516, DOI: 10.3131/jvsj.46.377
H. DAIMON: "New display-type analyzer for the energy and the angular distribution of charged particles", REV. SCI. INSTRUM., vol. 59, 1988, pages 545
F. MATSUI ET AL.: "Three-dimensional band mapping of graphite", APPL. PHYS. LETT., vol. 81, 2002, pages 2556, XP012032062, DOI: 10.1063/1.1511818
F. MATSUI ET AL.: "Atomic-orbital analysis of the Cu Fermi surface by two-dimensional photoelectron spectroscopy", PHYS. REV. B, vol. 72, 2005, pages 195417
F. MATSUIT. MATSUSHITAH. DAIMON: "Stereo atomscope and diffraction spectroscopy-Atomic site specific property analysis", J. ELECTRON SPECTROSC. RELAT. PHENOM, vol. 178-179, 2010, pages 221
F. MATSUI ET AL.: "Selective detection of angular-momentum-polarized Auger electrons by atomic stereography", PHYS. REV. LETT, vol. 114, 2015, pages 015501
H. MATSUDAH. DAIMONM. KATOM. KUDO: "Approach for simultaneous measurement of two-dimensional angular distribution of charged particles: Spherical aberration correction using an ellipsoidal mesh", PHYS. REV. E, vol. 71, 2005, pages 066503
H. MATSUDAH. DAIMON: "Approach for simultaneous measurement of two-dimensional angular distribution of charged particles. II. Deceleration and focusing of wide-angle beams using a curved mesh lens", PHYS. REV. E, vol. 74, 2006, pages 036501
H. MATSUDA ET AL.: "Development of display-type ellipsoidal mesh analyzer: Computational evalua tion and experimental validation", J. ELECTRON SPECTROSC. RELAT. PHENOM, vol. 195, 2014, pages 382
M. KOTSUGI ET AL.: "Microspectro-scopic two-dimensional Fermi surface mapping using a photoelectron emission microscope", REV. SCI. INSTRUM., vol. 74, 2003, pages 2754
C. TUSCHE ET AL.: "Spin resolved bandstructure imaging with a high resolution momentum microscope", ULTRAMICROSCOPY, vol. 159, 2015, pages 520, XP029346298, DOI: 10.1016/j.ultramic.2015.03.020
T. OKUDA ET AL.: "J. Electron Spectrosc", RELAT. PHENOM, vol. 201, 2015, pages 23
E. KISKER ET AL., REV. SCI. INSTRUM, vol. 50, 1979, pages 1598
L.VATTUONEM.ROCCA: "Electrostatic electron analyzer with 90° deflection angle", REV. SCI. INSTRUM., vol. 73, 2002, pages 3861, XP012039468, DOI: 10.1063/1.1510555
A. W. ROSS ET AL.: "J. Electron Spectrosc", RELAT. PHENOM, vol. 69, 1994, pages 189
T. KOHASHI ET AL.: "A spin rotator used for detecting all three magnetization vector components in spin-polarized electron microscopy", J. MAG. SOC. JPN, vol. 18, 1994, pages 7
ISARI KOUJI, HIROAKI YOSHIDA, TATSUO GEJO, EIICHI KOBAYASHI, KAZUHIKO MASE, SHIN-ICHI NAGAOKA, KENICHIRO TANAKA: "Construction and Evaluation of Coaxially Symmetric Mirror Electron Energy Analyzer with High Sensitivity, and Its Application to Coincidence Spectroscopy", SHINKU / VACUUM SOCIETY OF JAPAN. JOURNAL., NIHON SHINKU KYOKAI, TOKYO, JP, vol. 46, no. 5, 20 May 2003 (2003-05-20), JP , pages 377 - 384, XP055885301, ISSN: 0559-8516, DOI: 10.3131/jvsj.46.377
H. DAIMON: "New display-type analyzer for the energy and the angular distribution of charged particles", REV. SCI. INSTRUM., vol. 59, 1988, pages 545
F. MATSUI ET AL.: "Three-dimensional band mapping of graphite", APPL. PHYS. LETT., vol. 81, 2002, pages 2556, XP012032062, DOI: 10.1063/1.1511818
F. MATSUI ET AL.: "Atomic-orbital analysis of the Cu Fermi surface by two-dimensional photoelectron spectroscopy", PHYS. REV. B, vol. 72, 2005, pages 195417
F. MATSUIT. MATSUSHITAH. DAIMON: "Stereo atomscope and diffraction spectroscopy-Atomic site specific property analysis", J. ELECTRON SPECTROSC. RELAT. PHENOM, vol. 178-179, 2010, pages 221
F. MATSUI ET AL.: "Selective detection of angular-momentum-polarized Auger electrons by atomic stereography", PHYS. REV. LETT, vol. 114, 2015, pages 015501
H. MATSUDAH. DAIMONM. KATOM. KUDO: "Approach for simultaneous measurement of two-dimensional angular distribution of charged particles: Spherical aberration correction using an ellipsoidal mesh", PHYS. REV. E, vol. 71, 2005, pages 066503
H. MATSUDAH. DAIMON: "Approach for simultaneous measurement of two-dimensional angular distribution of charged particles. II. Deceleration and focusing of wide-angle beams using a curved mesh lens", PHYS. REV. E, vol. 74, 2006, pages 036501
H. MATSUDA ET AL.: "Development of display-type ellipsoidal mesh analyzer: Computational evalua tion and experimental validation", J. ELECTRON SPECTROSC. RELAT. PHENOM, vol. 195, 2014, pages 382
M. KOTSUGI ET AL.: "Microspectro-scopic two-dimensional Fermi surface mapping using a photoelectron emission microscope", REV. SCI. INSTRUM., vol. 74, 2003, pages 2754
C. TUSCHE ET AL.: "Spin resolved bandstructure imaging with a high resolution momentum microscope", ULTRAMICROSCOPY, vol. 159, 2015, pages 520, XP029346298, DOI: 10.1016/j.ultramic.2015.03.020
T. OKUDA ET AL.: "J. Electron Spectrosc", RELAT. PHENOM, vol. 201, 2015, pages 23
E. KISKER ET AL., REV. SCI. INSTRUM, vol. 50, 1979, pages 1598
L.VATTUONEM.ROCCA: "Electrostatic electron analyzer with 90° deflection angle", REV. SCI. INSTRUM., vol. 73, 2002, pages 3861, XP012039468, DOI: 10.1063/1.1510555
A. W. ROSS ET AL.: "J. Electron Spectrosc", RELAT. PHENOM, vol. 69, 1994, pages 189
T. KOHASHI ET AL.: "A spin rotator used for detecting all three magnetization vector components in spin-polarized electron microscopy", J. MAG. SOC. JPN, vol. 18, 1994, pages 7
Attorney, Agent or Firm:
THE PATENT CORPORATE BODY GLOBAL INTELLECTUAL PROPERTY (JP)
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