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Title:
ELECTROSTATIC DEVICE, ELECTROSTATIC DEVICE INTERMEDIATE BODY AND PRODUCTION METHOD
Document Type and Number:
WIPO Patent Application WO/2020/246116
Kind Code:
A1
Abstract:
An electrostatic device equipped with a fixed part, a movable part and an elastic support part for elastically supporting the movable part, all of which are formed on the same substrate, and also equipped with a first glass package which is anodically bonded to one surface among the front and rear surfaces of the substrate while in a state where the fixed part and the elastic support part are separated from one another, and a second glass package which is anodically bonded to the other surface among said front and rear surfaces while in a state where the fixed part and the elastic support part are separated from one another, and forms a sealed space in which the movable part is positioned between the first and second glass packages, wherein: an electret is formed in at least some of the fixed and movable parts; and a first electrode which is exposed to the outer surface of the second glass package and is connected to the fixed part and a second electrode which is exposed to the outer surface of the second glass package and is connected to the elastic support part are formed in the second glass package.

Inventors:
TOSHIYOSHI HIROSHI (JP)
HONMA HIROAKI (JP)
MITSUYA HIROYUKI (JP)
Application Number:
PCT/JP2020/012459
Publication Date:
December 10, 2020
Filing Date:
March 19, 2020
Export Citation:
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Assignee:
UNIV TOKYO (JP)
SAGINOMIYA SEISAKUSHO INC (JP)
International Classes:
H02N1/00; B81B3/00; B81C3/00
Foreign References:
JP2018523846A2018-08-23
JP2013250133A2013-12-12
JP2010512548A2010-04-22
JP2010011547A2010-01-14
JPH0832090A1996-02-02
JP2008105162A2008-05-08
JP2007331099A2007-12-27
JPH10213441A1998-08-11
JP2015161641A2015-09-07
JP2009515338A2009-04-09
JP2008209616A2008-09-11
JP2018088780A2018-06-07
JP2019106231A2019-06-27
Other References:
See also references of EP 3965283A4
Attorney, Agent or Firm:
NAGAI, Fuyuki et al. (JP)
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