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Title:
ELECTROSTATIC DEVICE AND METHOD FOR MANUFACTURING ELECTROSTATIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2020/246115
Kind Code:
A1
Abstract:
This vibration power generation element includes a fixed part, a movable part, an elastic support part that is integrally formed with the movable part and that elastically supports the movable part, and a glass base part in which the fixed part and the elastic support part are anodically bonded to each other in a separated state.

Inventors:
TOSHIYOSHI HIROSHI (JP)
HONMA HIROAKI (JP)
MITSUYA HIROYUKI (JP)
Application Number:
PCT/JP2020/012458
Publication Date:
December 10, 2020
Filing Date:
March 19, 2020
Export Citation:
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Assignee:
UNIV TOKYO (JP)
SAGINOMIYA SEISAKUSHO INC (JP)
International Classes:
B81B3/00; H02N1/00; B81C3/00
Foreign References:
JP2010011547A2010-01-14
JP2018523846A2018-08-23
JP2013250133A2013-12-12
JP2010512548A2010-04-22
JP2008229823A2008-10-02
US6146917A2000-11-14
JP2014187354A2014-10-02
JP2013030759A2013-02-07
JP2009045712A2009-03-05
JPH09166618A1997-06-24
JP2008105162A2008-05-08
JP2009515338A2009-04-09
JP2016059191A2016-04-21
JP2013013256A2013-01-17
JP2019106230A2019-06-27
Other References:
See also references of EP 3965284A4
Attorney, Agent or Firm:
NAGAI, Fuyuki et al. (JP)
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