Title:
ELECTROSTATIC LENS, AND PARALLEL BEAM GENERATION DEVICE AND PARALLEL BEAM CONVERGENCE DEVICE WHICH USE ELECTROSTATIC LENS AND COLLIMATOR
Document Type and Number:
WIPO Patent Application WO/2017/010529
Kind Code:
A1
Abstract:
Provided is a compact device which captures, over a wide solid angle range, electrically charged particles emitted from a point source and parallelizes the trajectories of said charged particles. The present invention is configured from: an electrostatic lens comprising a plurality of axisymmetric electrodes (10-14) and an axisymmetric aspherical mesh (2) which has a surface that is concave away from the point source; and a flat collimator plate (3) positioned coaxially with the electrostatic lens. The acceptance angle for the electrically charged particles generated from a point source (7) is ±30º or greater. The shape of the aspherical mesh (2), and the potentials and the positions of a ground electrode (10) and application electrodes (11-15) are adjusted so that the trajectories of the electrically charged particles are substantially parallelized by the electrostatic lens. The electrostatic lens and the flat collimator plate are positioned on a common axis so that after the trajectories of the electrically charged particles have been substantially parallelized with respect to the axis, the charged particles enter the flat collimator plate (3) at an angle of incidence substantially perpendicular thereto.
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Inventors:
MATSUI FUMIHIKO (JP)
MATSUDA HIROYUKI (JP)
MATSUDA HIROYUKI (JP)
Application Number:
PCT/JP2016/070744
Publication Date:
January 19, 2017
Filing Date:
July 13, 2016
Export Citation:
Assignee:
NAT UNIV CORP NARA INST OF SCIENCE AND TECH (JP)
International Classes:
H01J37/12; H01J37/05; H01J37/075; H01J37/09; H01J37/244; H01J37/252; H01J37/305; H01J43/24
Domestic Patent References:
| WO2008013232A1 | 2008-01-31 |
Foreign References:
| JP2001035434A | 2001-02-09 | |||
| US20100163725A1 | 2010-07-01 | |||
| JP2004507861A | 2004-03-11 |
Other References:
TÓTH, LÁSZLÓ ET AL.: "Details of 1 PI sr wide acceptance angle electrostatic lens for electron energy and two-dimensional angular distribution analysis combined with real space imaging", NUCLEAR INSTRUMENTS AND METHODS IN PHYSICS RESEARCH SECTION A, vol. 661, no. 1, 21 September 2011 (2011-09-21), pages 98 - 105, XP028103472
MATSUDA, H. ET AL.: "Development of display-type ellipsoidal mesh analyzer: Computational evaluation and experimental validation", JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, vol. 195, 13 May 2014 (2014-05-13), pages 382 - 398, XP055345978
MATSUDA, H. ET AL.: "Approach for simultaneous measurement of two-dimensional angular distribution of charged particles: Spherical aberration correction using an ellipsoidal mesh", PHYSICAL REVIEW E, vol. 71, 28 June 2005 (2005-06-28), pages 066503, XP003020696
See also references of EP 3324421A4
MATSUDA, H. ET AL.: "Development of display-type ellipsoidal mesh analyzer: Computational evaluation and experimental validation", JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, vol. 195, 13 May 2014 (2014-05-13), pages 382 - 398, XP055345978
MATSUDA, H. ET AL.: "Approach for simultaneous measurement of two-dimensional angular distribution of charged particles: Spherical aberration correction using an ellipsoidal mesh", PHYSICAL REVIEW E, vol. 71, 28 June 2005 (2005-06-28), pages 066503, XP003020696
See also references of EP 3324421A4
Attorney, Agent or Firm:
THE PATENT CORPORATE BODY GLOBAL INTELLECTUAL PROPERTY (JP)
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