ELECTROSTATIC LEVITATION CONVEYOR AND ELECTROSTATIC LEVITATION ELECTRODES THEREOF

Title:

ELECTROSTATIC LEVITATION CONVEYOR AND ELECTROSTATIC LEVITATION ELECTRODES THEREOF

Document Type and Number:

WIPO Patent Application WO/1995/025689

Kind Code:

A1

Abstract:

An electrostatic levitation electrode (10) is divided equally into four parts on a disk-like insulating substrate (4) with separation bands (11a, 11b) between them. A positive voltage and a negative voltage are alternately applied to these four fan-shaped electrodes (10a, 10b, 10c, 10d). A round (13) is formed at the corner of each fan-shaped electrodes (10a, 10b, 10c, 10d), and lead wires (12a, 12b, 12c, 12d) are connected to the outer side surfaces of the fan-shaped electrodes (10a, 10b, 10c, 10d), respectively. Accordingly, damage of the electrodes at the lead portions can be eliminated, maximum attraction force and levitation rigidity can be improved, and a levitated body can be correctly conveyed.

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Inventors:

HIGUCHI TOSHIRO (JP)
JIN JU (JP)
KANEMOTO MANABU (JP)

Application Number:

PCT/JP1995/000470

Publication Date:

September 28, 1995

Filing Date:

March 17, 1995

Export Citation:

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Assignee:

KANAGAWA KAGAKU GIJUTSU AKAD (JP)
MITSUBISHI MATERIALS CORP (JP)
HIGUCHI TOSHIRO (JP)
JIN JU (JP)
KANEMOTO MANABU (JP)

International Classes:

B65G54/02; B65H3/18; B65H5/00; H01L21/677; H01L21/683; H02N1/00; H02N13/00; (IPC1-7): B65G54/02; B25J15/06; B65H5/00; H01L21/68

Foreign References:

JPH02164288A	1990-06-25
JPH04372152A	1992-12-25
JPH056933A	1993-01-14
JPH06143075A	1994-05-24

Other References: