Title:
ELECTROSTATIC MICROACTUATOR
Document Type and Number:
WIPO Patent Application WO2008010775
Kind Code:
A9
Abstract:
Electrostatic microactuators are described in which stationary electrodes (4) and movable electrodes (3) mounted on flexures (6) have relative locations and mechanical properties such that non-linear pull-in/pull-out behavior is displayed when a voltage is applied between the stationary electrodes (4) and the electrodes do not come into contact. Larger electrostatic forces and longer travel ranges are achievable with lower applied voltages than typical microactuators. Further advantageous properties are obtained with the application of time-varying voltages with peak values exceeding the pull-in voltage and also at frequencies near a resonant frequency of the device. Several applications are described.
Inventors:
LEE KI BANG (SG)
Application Number:
PCT/SG2007/000215
Publication Date:
March 06, 2008
Filing Date:
July 20, 2007
Export Citation:
Assignee:
LEE KI BANG (SG)
International Classes:
H02N1/00; G01C19/00; G01P15/08; G09G3/34
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