Title:
ELECTROSTATIC SPRAYING DEVICE
Document Type and Number:
WIPO Patent Application WO/2013/105445
Kind Code:
A1
Abstract:
In this electrostatic spraying device for depositing an organic thin film using electrostatic spraying, productivity is increased while maintaining uniformity of the formed film and suppressing layer mixing with the base layer. This electrostatic spraying device (1) is configured to be provided with an aerosol generating means which generates an aerosol (12) comprising dispersed charged particles (13) of an organic material, a chamber (10) which stores the aerosol generated by the aerosol generating means, a conveyance path (20) connected at one end to the chamber, a nozzle (30) provided at the other end of the conveyance path, a conveyance means which delivers a carrier gas to convey the aerosol from the chamber via the conveyance path to the nozzle, and a support means which supports a substrate (2) and holds the substrate at a potential difference with the charged particles.
Inventors:
HIROSE TATSUYA (JP)
KURAKATA SHINICHI (JP)
KUDO ICHIRO (JP)
KURIYAMA MASAAKI (JP)
KURAKATA SHINICHI (JP)
KUDO ICHIRO (JP)
KURIYAMA MASAAKI (JP)
Application Number:
PCT/JP2012/083798
Publication Date:
July 18, 2013
Filing Date:
December 27, 2012
Export Citation:
Assignee:
KONICA MINOLTA INC (JP)
HIROSE TATSUYA (JP)
KURAKATA SHINICHI (JP)
KUDO ICHIRO (JP)
KURIYAMA MASAAKI (JP)
HIROSE TATSUYA (JP)
KURAKATA SHINICHI (JP)
KUDO ICHIRO (JP)
KURIYAMA MASAAKI (JP)
International Classes:
B05B5/08; H01L51/50; H05B33/10
Domestic Patent References:
| WO2011001613A1 | 2011-01-06 |
Foreign References:
| JP2010045222A | 2010-02-25 | |||
| JP2009199757A | 2009-09-03 | |||
| JP2008264679A | 2008-11-06 | |||
| JP2003509817A | 2003-03-11 | |||
| JP2008167981A | 2008-07-24 | |||
| JP2010520044A | 2010-06-10 |
Attorney, Agent or Firm:
KOYO INTERNATIONAL PATENT FIRM (JP)
Patent business corporation Mitsuaki international patent firm (JP)
Patent business corporation Mitsuaki international patent firm (JP)
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Claims: