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Title:
ELECTROSTATIC SUSPENSION FURNACE AND METHOD OF FUSING SAMPLE USING THIS
Document Type and Number:
WIPO Patent Application WO/2004/083757
Kind Code:
A1
Abstract:
An electrostatic suspension furnace comprising a vacuum chamber, main electrodes facing each other in this vacuum chamber, auxiliary electrodes for moving a sample suspended by electric fields produced between main electrodes, and laser emitting units for emitting laser beams to a sample moved to a specified position to fuse it, wherein a plurality of main electrodes are disposed in a vertical direction with proper intervals to respectively form electric field generating spaces between adjacent main electrodes and auxiliary electrodes are respectively disposed in association with respective electric field generating spaces, the laser emitting units are respectively disposed on a main electrode side positioned at the top and on a main electrode side positioned at the bottom so as to face each other coaxially, and through holes for passing a sample therethrough are provided on the laser beam paths of main electrodes positioned in intermediate positions. In this electrostatic suspension furnace, for example, when two samples are to be fused, they are individually melted while being suspended and can be fused with respective temperatures maintained regardless of the samples being conductors or not, and as a result fusing can be achieved with an external interference excluded.

Inventors:
KAWASAKI KAZUNORI (JP)
ASAHI HIROAKI (JP)
Application Number:
PCT/JP2004/002190
Publication Date:
September 30, 2004
Filing Date:
February 25, 2004
Export Citation:
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Assignee:
IHI AEROSPACE CO LTD (JP)
KAWASAKI KAZUNORI (JP)
ASAHI HIROAKI (JP)
International Classes:
F27B14/04; F27B17/00; F27D7/06; F27D21/02; (IPC1-7): F27B17/00; F27B14/04
Foreign References:
JP2002206865A2002-07-26
JPH11241888A1999-09-07
Attorney, Agent or Firm:
Matoba, Motonori c/o Matoba International Patent Office (MR Building 3F 30-17, Hongo 1-chom, Bunkyo-ku Tokyo 33, JP)
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