Title:
ELECTROSTATIC TRAP FOR PARTICLES ENTRAINED IN AN ION BEAM
Document Type and Number:
WIPO Patent Application WO2002019377
Kind Code:
A3
Abstract:
A system (10) for inhibiting the transport of contaminant particles (60) with an ion beam (44) includes a pair of electrodes (14, 16) that provide opposite electric fields (26, 28, 30, 32) through which the ion beam (44) travels. A particle (60) entrained in the ion beam (44) is charged to a polarity matching the polarity of ion beam (44) when traveling through a first of the electric fields (26, 28). The downstream electrode (16) provides another electric field (30, 32) for repelling the positively charged particle (60) away from the direction of beam travel.
Inventors:
HARRINGTON ERIC RYAN
BENVENISTE VICTOR MAURICE
GRAF MICHAEL ANTHONY
RATHMELL ROBERT DAY
BENVENISTE VICTOR MAURICE
GRAF MICHAEL ANTHONY
RATHMELL ROBERT DAY
Application Number:
PCT/GB2001/003758
Publication Date:
May 10, 2002
Filing Date:
August 21, 2001
Export Citation:
Assignee:
AXCELIS TECH INC (US)
EATON LTD (GB)
EATON LTD (GB)
International Classes:
H01J3/40; H01J37/02; H01J37/30; H01J37/317; H01L21/265; (IPC1-7): H01J37/317; H01J37/02; H01J37/30; H01J3/40
Domestic Patent References:
| WO2000026938A1 | 2000-05-11 |
Foreign References:
| US5148034A | 1992-09-15 |
Other References:
See also references of EP 1314181A2
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