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Title:
ELECTROSTATICALLY FOCUSED ADDRESSABLE FIELD EMISSION ARRAYCHIPS (AFEA'S) FOR HIGH-SPEED MASKLESS DIGITAL E-BEAM DIRECT WRITE LITHOGRAPHY AND SCANNING ELECTRON MICROSCOPY
Document Type and Number:
WIPO Patent Application WO2000060632
Kind Code:
A3
Abstract:
System and methods are described for addressable field emission array (AFEA) chips. A method of operating an addressable field-emission array, includes: generating a plurality of electron beams from a plurality of emitters that compose the addressable field-emission array; and focusing at least one of the plurality of electron beams with an on-chip electrostatic focusing stack. The system and methods provide advantages including the avoidance of space-charge blow-up.

Inventors:
THOMAS CLARENCE E (US)
BAYLOR LARRY R (US)
VOELKL EDGAR (US)
LOWNDES DOUGLAS H (US)
PAULUS MICHAEL J (US)
Application Number:
US0008313W
Publication Date:
January 25, 2001
Filing Date:
March 29, 2000
Export Citation:
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Assignee:
UT BATTELLE LLC (US)
THOMAS CLARENCE E (US)
BAYLOR LARRY R (US)
VOELKL EDGAR (US)
LOWNDES DOUGLAS H (US)
PAULUS MICHAEL J (US)
International Classes:
G01Q30/02; G01Q70/06; G03F7/20; H01J1/304; H01J3/02; H01J37/073; H01J37/28; H01J37/305; H01J37/317; H01L21/027; (IPC1-7): H01J3/02; G03F7/20; H01J37/065
Foreign References:
JPH07192682A1995-07-28
EP0520780A11992-12-30
US5189306A1993-02-23
Other References:
CHANG T H P ET AL: "ELECTRON-BEAM MICROCOLUMNS FOR LITHOGRAPHY AND RELATED APPLICATIONS", JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY: PART B,US,AMERICAN INSTITUTE OF PHYSICS. NEW YORK, vol. 14, no. 6, 1 November 1996 (1996-11-01), pages 3774 - 3781, XP000721110, ISSN: 0734-211X
CHANG T H P ET AL: "ARRAYED MINIATURE ELECTRON BEAM COLUMNS FOR HIGH THROUGHPUT SUB-100 NM LITHOGRAPHY", JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY: PART B,US,AMERICAN INSTITUTE OF PHYSICS. NEW YORK, vol. 10, no. 6, 1 November 1992 (1992-11-01), pages 2743 - 2748, XP000332477, ISSN: 0734-211X
CHANG T H P ET AL: "ELECTRON BEAM TECHNOLOGY - SEM TO MICROCOLUMN", MICROELECTRONIC ENGINEERING,NL,ELSEVIER PUBLISHERS BV., AMSTERDAM, vol. 32, no. 1/04, 1 September 1996 (1996-09-01), pages 113 - 130, XP000624903, ISSN: 0167-9317
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