Title:
PIEZOELECTRIC/ ELECTROSTRICTIVE DEVICE AND ITS PRODUCTION METHOD
Document Type and Number:
WIPO Patent Application WO/2003/061023
Kind Code:
A1
Abstract:
On a ceramic base (16) having a pair of opposed thin plates (12a, 12b), movable parts (20a, 20b), and a fixing part (14) supporting the thin plates (12a, 12b) and the movable parts (20a, 20b), a wiring pattern (26) and a gap (40) or an insulating layer (42) of a cermet layer with which the gap is filled are formed. The ceramic base with the wiring pattern and gap or insulating layer is baked. Piezoelectric/electrostrictive layers (22) and electrode layers (24) of a cermet made of a piezoelectric/ electrostrictive material and a conductive material are alternately and staggeredly formed. Thus, a piezoelectric/electrostrictive device having multilayer piezoelectric/electrostrictive elements (18a, 18b) having a comb-teeth cross-section is produced.
Inventors:
IKEDA KOJI
TAKAHASHI FUMITAKE
SHIBATA KAZUYOSHI
ITOH HARUHIKO
TAKAHASHI FUMITAKE
SHIBATA KAZUYOSHI
ITOH HARUHIKO
Application Number:
PCT/JP2003/000162
Publication Date:
July 24, 2003
Filing Date:
January 10, 2003
Export Citation:
Assignee:
NGK INSULATORS LTD (JP)
International Classes:
H01L41/047; H01L41/083; H01L41/09; H01L41/273; H01L41/297; (IPC1-7): H01L41/09; H01L41/24
Foreign References:
| EP1089359A2 | 2001-04-04 | |||
| JPH07235708A | 1995-09-05 |
Other References:
PEARCE D.H. ET AL.: "Alternative processing routes for RAINBOW-type piezoelectric devices", PROCEEDINGS OF THE ELEVENTH IEEE INTERNATIONAL SYMPOSIUM ON APPLICATIONS OF FERROELECTRICS, August 1998 (1998-08-01), pages 547 - 549, XP010347251
Attorney, Agent or Firm:
Chiba, Yoshihiro (1-1 Yoyogi 2-chom, Shibuya-ku Tokyo, JP)
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