Title:
ELEMENT MANUFACTURING METHOD
Document Type and Number:
WIPO Patent Application WO/2016/158965
Kind Code:
A1
Abstract:
The present invention provides an element manufacturing method. An element manufacturing method according to the present invention includes: a first step for obtaining a thickness distribution in a surface direction of a workpiece 100; a second step for calculating a processing-amount distribution from the difference between the thickness distribution and a desired film-thickness distribution; a third step for locally processing the workpiece according to the processing-amount distribution; a fourth step, following the third step, for segmenting the inside of the surface of the workpiece into a plurality of element sections and forming an electrode in each of the element sections; and a fifth step for dividing each of the plurality of element sections to form a plurality of elements.
Inventors:
WATANABE KEIICHIRO (JP)
Application Number:
PCT/JP2016/060158
Publication Date:
October 06, 2016
Filing Date:
March 29, 2016
Export Citation:
Assignee:
KYOCERA CORP (JP)
International Classes:
H03H3/02; H01L41/29; H01L41/332; H01L41/338
Foreign References:
| JP2007068113A | 2007-03-15 | |||
| JP2002122471A | 2002-04-26 | |||
| JP2010147963A | 2010-07-01 | |||
| JP2011228931A | 2011-11-10 |
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