Title:
ELLIPSOMETRY DEVICE AND ELLIPSOMETRY METHOD
Document Type and Number:
WIPO Patent Application WO/2018/038064
Kind Code:
A1
Abstract:
The present invention provides an ellipsometry device and method whereby measurement efficiency can be enhanced. In this method, an object is illuminated by spherical-wave illumination light Q linearly polarized at 45° (S1), and object light O as reflected light is acquired in a hologram IOR using a spherical-wave reference light R having a focal point near the focal point of the illumination light Q, and a hologram ILR of the reference light R is furthermore acquired using spherical-wave reference light L having the same focal point as the illumination light Q (S2). The holograms are separated into p- and s-polarized light holograms Iκ∙OR, Iκ∙LR (κ = p, s) and processes, object light waves are extracted, and an object light spatial frequency spectrum Gκ(u, v) (κ = p, s) is generated (S3) (S4). An ellipsometry angle Ψ(θ), Δ(θ) is obtained for each incidence angle θ from the amplitude reflection coefficient ratio ρ = Gp/Gs = tanΨ∙exp(iΔ). Through use of numerous lights having different incidence angles θ included by the illumination light Q, data of numerous reflection lights can be acquired at once in a hologram and processed.
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Inventors:
SATO KUNIHIRO (JP)
Application Number:
PCT/JP2017/029829
Publication Date:
March 01, 2018
Filing Date:
August 21, 2017
Export Citation:
Assignee:
UNIV HYOGO (JP)
International Classes:
G01J4/04; G03H1/04
Domestic Patent References:
| WO2012002207A1 | 2012-01-05 |
Foreign References:
| JP2012154847A | 2012-08-16 | |||
| JP2009535609A | 2009-10-01 | |||
| US20010052979A1 | 2001-12-20 |
Other References:
ZHU, MEIJUAN ET AL.: "A new method for acquiring the complex hologram in optical scanning holography", PROC. OF SPIE, vol. 8134, 2011, pages 81340R - 1 - 81340R-6, XP060018810
Attorney, Agent or Firm:
ITAYA, Yasuo (JP)
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