Title:
EMERGENCY STOP DEVICE, ELECTRONIC-COMPONENT TESTING DEVICE WITH THE SAME, AND EMERGENCY STOP METHOD FOR ELECTRONIC COMPONENT TESTING DEVICE
Document Type and Number:
WIPO Patent Application WO/2007/113918
Kind Code:
A1
Abstract:
An emergency stop device (30) for making an emergency stop of an electronic-component testing
device (1) when a disaster occurs has a receiving section (31) capable of receiving
a disaster occurrence signal for calling attention to the occurrence of the disaster,
a determination section (32) for determining whether the disaster occurrence
signal continues for a predetermined time, and a discontinuation section (33)
for causing a test of an IC device by a tester (20) to be discontinued based on the
result of the determination by the determination section (32). After the discontinuation
section (33) discontinues the test by the tester, the tester (20) sends a command
signal to a control device (75) of a prober (70) so that the IC device is separated
from the probe card (50).
Inventors:
IHATA TSUYOHIRO (JP)
HONDA NOBUHIRO (JP)
HONDA NOBUHIRO (JP)
Application Number:
PCT/JP2006/307343
Publication Date:
October 11, 2007
Filing Date:
April 06, 2006
Export Citation:
Assignee:
ADVANTEST CORP (JP)
IHATA TSUYOHIRO (JP)
HONDA NOBUHIRO (JP)
IHATA TSUYOHIRO (JP)
HONDA NOBUHIRO (JP)
International Classes:
H01L21/66; G01R31/26; G01R31/28; H01L21/02
Foreign References:
| JP2005300381A | 2005-10-27 | |||
| JPH07330242A | 1995-12-19 |
Attorney, Agent or Firm:
NISHIDE, Shingo et al. (Nishishinjuku KF Bldg. 704,14-24, Nishishinjuku 8-chom, Shinjuku-ku Tokyo 23, JP)
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