Title:
EMITTER, ELECTRON GUN USING SAME, ELECTRONIC DEVICE USING SAME, AND METHOD FOR PRODUCING SAME
Document Type and Number:
WIPO Patent Application WO/2021/002305
Kind Code:
A1
Abstract:
The present invention provides: an emitter composed of an hafnium carbide (HfC) single crystal and emitting electrons stably with high efficiency; a method for producing same; an electron gun using same; and an electronic device. An emitter according to an embodiment of the present invention comprises a nanowire, wherein: the nanowire is composed of an HfC single crystal; at least an end portion of the nanowire, which is for emitting electrons, is covered with hafnium oxycarbide (ＨｆＣ１－ｘＯｘ, where 0
Inventors:
TANG JIE (JP)
TANG SHUAI (JP)
CHIU TA-WEI (JP)
HAYAMI WATARU (JP)
QIN LUCHANG (JP)
TANG SHUAI (JP)
CHIU TA-WEI (JP)
HAYAMI WATARU (JP)
QIN LUCHANG (JP)
Application Number:
PCT/JP2020/025435
Publication Date:
January 07, 2021
Filing Date:
June 29, 2020
Export Citation:
Assignee:
NAT INST MATERIALS SCIENCE (JP)
International Classes:
H01J37/073; H01J1/304; H01J9/02
Domestic Patent References:
| WO2016140177A1 | 2016-09-09 | |||
| WO2014007121A1 | 2014-01-09 | |||
| WO2017149862A1 | 2017-09-08 | |||
| WO2016140177A1 | 2016-09-09 | |||
| WO2019107113A1 | 2019-06-06 |
Other References:
W. A. MACKIE ET AL.: "Field emission from hafnium carbide", J. VAC. SCI. TECH. A, vol. 10, 1992, pages 2852 - 2856, XP000296466, DOI: 10.1116/1.577719
See also references of EP 3996126A4
See also references of EP 3996126A4
Attorney, Agent or Firm:
TSUZUKI Noriaki (JP)
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