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Patent Searching and Data


Title:
EMITTER, EMITTER FABRICATING METHOD, AND COLD ELECTRON EMITTING DEVICE FABRICATING METHOD
Document Type and Number:
WIPO Patent Application WO/2000/079556
Kind Code:
A1
Abstract:
A cold electron emitting device comprising an emitter fabricated by etching a columnar polycrystalline film (2) formed by growing columnar crystal grains (4) along the same crystal axis on a substrate (1). Even if multiple emitters are fabricated in such a cold electron emitting device, the uniformness of the shapes of the emitters is of good reproducibility, and the variation of electron emitting characteristic due to variation of the shapes of emitters is little, thereby fabricating a cold electron emitting device having a uniform emitting characteristic and formed on a large-area substrate.

Inventors:
NORIKANE TETSUYA (JP)
HIRANAKA KOICHI (JP)
WADA NAOKI (JP)
SATO YASUYO (JP)
Application Number:
PCT/JP2000/004114
Publication Date:
December 28, 2000
Filing Date:
June 23, 2000
Export Citation:
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Assignee:
MATSUSHITA ELECTRIC IND CO LTD (JP)
NORIKANE TETSUYA (JP)
HIRANAKA KOICHI (JP)
WADA NAOKI (JP)
SATO YASUYO (JP)
International Classes:
H01J1/304; H01J9/02; (IPC1-7): H01J1/304; H01J9/02
Foreign References:
JPH08306303A1996-11-22
JPH10312736A1998-11-24
JP2740444B21998-04-15
JPH04167325A1992-06-15
JPH09129123A1997-05-16
Attorney, Agent or Firm:
Hayase, Kenichi (Enoki-cho Suita-shi Osaka, JP)
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